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Mitsubishi Chemical Advanced Materials Semitron™ CMP LL5 PET Polyester
Categories: Polymer; Thermoplastic; Polyester, TP

Material Notes: Optimized for use in CMP retaining rings, Semitron™ CMP LL5 is a high-performance PET material with a superior wear life that is up to eight times greater than standard PPS when used in oxide chemistries.

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Physical PropertiesOriginal ValueComments
Specific Gravity 1.44 g/ccASTM D792
Water Absorption at Saturation 0.470 %ASTM D570 (17)
 
Electrical PropertiesOriginal ValueComments
Surface Resistivity per Square 1.00e+14 ohmANSI/ESD STM 11.11
Dielectric Constant 3.60
@Frequency 1.00e+6 Hz
ASTM D150
Dissipation Factor 0.00200
@Frequency 1.00e+6 Hz
ASTM D150
 
Thermal PropertiesOriginal ValueComments
CTE, linear 45.0 µin/in-°FASTM E-831 (TMA)
Thermal Conductivity 1.90 BTU-in/hr-ft²-°F
Melting Point 491 °FASTM D3418
Maximum Service Temperature, Air 210 °FContinuous Use Temperature in Air after 20000 hr
Deflection Temperature at 1.8 MPa (264 psi) 180 °FASTM D648
 
Chemical Resistance PropertiesOriginal ValueComments
Acids, Strong (pH 1-3) Acceptable
Acids, Weak Acceptable
Alcohols Acceptable
Alkalies, Strong (pH 11-14) Acceptable
Alkalies, Weak Acceptable
Chlorinated Solvents Unacceptable
Continuous Sunlight Limited
Hot Water / Steam Limited
Hydrocarbons - Aliphatic Unacceptable
Hydrocarbons - Aromatic Unacceptable
Inorganic Salt Solutions Acceptable
Ketones, Esters Unacceptable
 
Miscellaneous PropertiesOriginal ValueComments
Data Sheet Region Americas
Targeted Usage Load + Bearing
 
Descriptive Properties
ESd categoryInsulative

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